濕式蝕刻製程設備
SC1, SC2, SPM, RCA, Stripper
Wafer Cassette Wet Bench
濕式清洗設備
濕式蝕刻設備
濕式蝕刻製程設備
SC1, SC2, SPM, RCA, Stripper
Wafer Cassette Wet Bench
濕式清洗設備
濕式蝕刻設備
中央供酸櫃
Wet Bench
Clean Bench
Clean Booth
化學櫃